This letter reports the transformation of large-area planar metal–insulator–metal (MIM) nanomembrane capacitors into compact tubular 3-D architectures. By combining the powerful approach of strain-induced nanomembrane self-assembly with an external magnetic field, a stable winding process over a large distance in the range of centimeters is demonstrated. A wet release platform based on encapsulated methyl cellulose allows to release the planar structures with rates of several $100~\mu \text{m}$ /s from their substrate. Footprint shrinkage factors up to 230 are shown by assembling 24-mm long planar structures into 3-D architectures having 82- $\mu \text{m}$ diameter and ~120 windings. The fabricated capacitors feature a capacitance per footprint up to $1.3~\mu \text{F}$ /mm ² for a 15-nm Al ₂ O ₃ dielectric with less than 100-nA/ $\mu \text{F}$ leakage at 6 V and improved frequency characteristics. This technology is a promising candidate for bridging the gap between discrete multilayer ceramic capacitor (MLCC) and ON-chip trench capacitor technologies.

中文翻译：

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磁场辅助自绕式3D纳米膜电容器弥合了MLCC和沟槽电容器技术之间的差距

这封信报道了将大面积平面金属-绝缘体-金属（MIM）纳米膜电容器转换为紧凑的管状3-D结构的过程。通过将应变诱导的纳米膜自组装的强大方法与外部磁场相结合，证明了在厘米范围内的较大距离上稳定的缠绕过程。基于包封的甲基纤维素的湿释放平台可以以几倍的速率释放平面结构 $ 100〜\ mu \ text {m} $ / s。通过将24毫米长的平面结构组装到具有82- $ \ mu \ text {m} $ 直径和约120个绕组。制成的电容器的单位面积电容高达 $ 1.3〜\ mu \ text {F} $ / mm ^2（对于小于100nA /的15-nm Al ₂ O ₃电介质） $ \ mu \ text {F} $ 6 V时的漏电和改进的频率特性 该技术是弥合离散多层陶瓷电容器（MLCC）与芯片上沟槽电容器技术之间差距的有希望的候选人。