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Boron liquid metal alloy ion sources for special focused ion beam applications
Journal of Vacuum Science & Technology B ( IF 1.4 ) Pub Date : 2020-07-01 , DOI: 10.1116/6.0000073
Lothar Bischoff 1 , Nico Klingner 1 , Paul Mazarov 2 , Wolfgang Pilz 2 , Fabian Meyer 2
Affiliation  

Focused Ion Beam (FIB) processing has been established as a well-suited and promising technique in R&D in nearly all fields of nanotechnology for patterning and prototyping on the micro and nanometer scale and below. Among other concepts, liquid metal alloy ion sources (LMAIS) are one of the alternatives to conventional gallium beams to extend the FIB application field. To meet the rising demand for light ions, different boron containing alloys were investigated in this work. A promising solution was found in a Co31Nd64B5 based LMAIS which will be introduced in more detail. Besides cobalt as a ferromagnetic element and the rare earth element neodymium, boron in particular is of interest for special FIB applications like local p-type doping, for which resolution of about 30 nm has been achieved so far.

中文翻译:

用于特殊聚焦离子束应用的硼液态金属合金离子源

聚焦离子束 (FIB) 处理已被确立为一种非常适合且有前途的技术,用于几乎所有纳米技术领域的研发,用于在微米和纳米尺度及以下进行图案化和原型制作。在其他概念中,液态金属合金离子源 (LMAIS) 是传统镓束的替代品之一,可扩展 FIB 应用领域。为了满足对轻离子不断增长的需求,本工作研究了不同的含硼合金。在基于 Co31Nd64B5 的 LMAIS 中找到了一个有前景的解决方案,我们将对其进行更详细的介绍。除了作为铁磁元素的钴和稀土元素钕之外,硼尤其适用于特殊的 FIB 应用,如局部 p 型掺杂,迄今为止已实现了约 30 nm 的分辨率。
更新日期:2020-07-01
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