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Development of two-color resonant ionization sputtered neutral mass spectrometry and microarea imaging for Sr
Journal of Vacuum Science & Technology B ( IF 1.4 ) Pub Date : 2020-07-01 , DOI: 10.1116/6.0000006
Yue Zhao 1 , Takeru Yoshida 2 , Yuzuka Ohmori 3 , Yuta Miyashita 3 , Masato Morita 2, 3 , Tetsuo Sakamoto 2, 3 , Kotaro Kato 4 , Ryohei Terabayashi 4 , Volker Sonnenschein 4 , Hideki Tomita 4 , Toshihide Kawai 5 , Takeo Okumura 5 , Yukihiko Satou 6 , Masabumi Miyabe 7 , Ikuo Wakaida 7
Affiliation  

Two-color resonant laser ionization sputtered neutral mass spectrometry offers high elemental selectivity. In this study, two-color resonance ionization in sputtered neutral Sr was confirmed by combining a grating type Ti:sapphire laser system and a time-of-flight secondary ion mass spectrometry (TOF-SIMS) system. The authors compared the ionization efficiencies of Sr of the two-color three-photon ionization scheme 1 (first step: 460.862 nm; second step: 767.519 nm) and the two-color two-photon ionization scheme 2 (first step: 460.862 nm; second step: 405.200 nm). The resonant ionization efficiency of the latter was found to be 50 times larger than that of the former. Finally, the authors mapped the microarea distribution of Sr by two-color resonant ionization sputtered neutral mass spectrometry.

中文翻译:

锶的双色共振电离溅射中性质谱和微区成像的研制

双色共振激光电离溅射中性质谱提供高元素选择性。在这项研究中,通过结合光栅型钛蓝宝石激光系统和飞行时间二次离子质谱 (TOF-SIMS) 系统,证实了溅射中性 Sr 中的双色共振电离。作者比较了双色三光子电离方案 1(第一步:460.862 nm;第二步:767.519 nm)和双色双光子电离方案 2(第一步:460.862 nm;第二步:405.200 纳米)。发现后者的共振电离效率是前者的 50 倍。最后,作者通过双色共振电离溅射中性质谱绘制了 Sr 的微区分布图。
更新日期:2020-07-01
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