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Research on sapphire micro-blind-hole machining based on femtosecond laser
Ferroelectrics ( IF 0.8 ) Pub Date : 2020-07-23 , DOI: 10.1080/00150193.2020.1760607 Xuyang Fang 1, 2 , Jian Dou 1, 2 , Xiangyang Dong 1, 2 , Wenqiang Duan 1, 2, 3
Ferroelectrics ( IF 0.8 ) Pub Date : 2020-07-23 , DOI: 10.1080/00150193.2020.1760607 Xuyang Fang 1, 2 , Jian Dou 1, 2 , Xiangyang Dong 1, 2 , Wenqiang Duan 1, 2, 3
Affiliation
Abstract The experiment of micro-blind-hole processing of sapphire by a femtosecond pulsed laser with a wavelength of 1030 nm, repetition frequency of 100 kHz and pulse width of 290 fs was carried out to study the effects of laser power, scanning speed, repeated scanning times and defocusing amount on the morphology of micro-blind holes. It can be seen from the experimental results that the depth of the micro-blind-hole increases as the laser power increases, the scanning speed decreases, and the repeated scanning times increase. When the defocusing amount is positive, the depth of micro-blind-hole decreases with the increase of defocusing amount. The depth is constant due to the filament effect during negative defocusing amount. The size of the micro-blind hole is mainly decided by the path of the circumferential cutting process. It is indicated that fine micromachining of sapphire materials can be achieved by controlling femtosecond laser parameters and processing parameters.
中文翻译:
基于飞秒激光的蓝宝石微盲孔加工研究
摘要 采用波长为 1030 nm、重复频率为 100 kHz、脉冲宽度为 290 fs 的飞秒脉冲激光对蓝宝石进行微盲孔加工实验,研究了激光功率、扫描速度、重复次数对蓝宝石的影响。扫描次数和散焦量对微盲孔形貌的影响。从实验结果可以看出,随着激光功率的增加,微盲孔的深度增加,扫描速度降低,重复扫描次数增加。当散焦量为正时,微盲孔的深度随着散焦量的增加而减小。由于负散焦量期间的灯丝效应,深度是恒定的。微盲孔的大小主要由圆周切削加工的路径决定。
更新日期:2020-07-23
中文翻译:
基于飞秒激光的蓝宝石微盲孔加工研究
摘要 采用波长为 1030 nm、重复频率为 100 kHz、脉冲宽度为 290 fs 的飞秒脉冲激光对蓝宝石进行微盲孔加工实验,研究了激光功率、扫描速度、重复次数对蓝宝石的影响。扫描次数和散焦量对微盲孔形貌的影响。从实验结果可以看出,随着激光功率的增加,微盲孔的深度增加,扫描速度降低,重复扫描次数增加。当散焦量为正时,微盲孔的深度随着散焦量的增加而减小。由于负散焦量期间的灯丝效应,深度是恒定的。微盲孔的大小主要由圆周切削加工的路径决定。