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Photolithographic fabrication of high-voltage output integrated all-solid-state planar on-chip micro-supercapacitors
Ferroelectrics ( IF 0.8 ) Pub Date : 2020-07-23 , DOI: 10.1080/00150193.2020.1760612
Wenqiang Zhao 1 , Fangshuo Liu 1 , Chunfeng Liu 1 , Xiang Li 1 , Ludi Zhang 1 , Guangyu Zhang 1
Affiliation  

Abstract Nowadays, the integration of energy storage micro-devices has attracted more and more attention. The integration of planar on-chip micro-supercapacitors (MSCs) not only supplies a higher voltage output, but also meets the requirements of different devices for output voltage by adjusting the number of integrated MSCs. Here, we show an integrated all-solid-state planar on-chip MSC, which based on reduced graphene oxide film with photolithography technology. This series of MSCs can support 2 V output voltage. In addition, it also possessed better electrochemical performance, and its area capacitance, stack capacitance, energy density, and power density had reached 9.48 μF cm−2, 7.90 F cm−3, 1.10 mWh cm−3 and 12.7 W cm−3 at an output voltage of 2 V. Meanwhile, it had a better cycle stability. After 10,000 cycles, 98.5% of the capacitor could be retained. If such a planar on-chip MSC is highly integrated, its electrochemical properties will be greatly improved, which will greatly promote the development of MSCs.

中文翻译:

高压输出集成全固态平面片上微型超级电容器的光刻制造

摘要 如今,储能微器件的集成越来越受到人们的关注。平面片上微型超级电容器(MSC)的集成不仅提供更高的电压输出,而且通过调整集成MSC的数量来满足不同器件对输出电压的要求。在这里,我们展示了一种集成的全固态平面片上 MSC,它基于使用光刻技术还原氧化石墨烯膜。该系列MSC可支持2V输出电压。此外,它还具有更好的电化学性能,其面积电容、叠层电容、能量密度和功率密度分别达到了 9.48 μF cm-2、7.90 F cm-3、1.10 mWh cm-3 和 12.7 W cm-3。输出电压为2V,同时具有较好的循环稳定性。10,000 次循环后,98。可以保留5%的电容。如果这种平面片上MSC高度集成,其电化学性能将大大提高,这将极大地促进MSCs的发展。
更新日期:2020-07-23
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