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A gasket-type standard leak element using femtosecond laser micromachining
Vacuum ( IF 4 ) Pub Date : 2020-10-01 , DOI: 10.1016/j.vacuum.2020.109650 C.K. Chan , C.Y. Tu , S.D. Yeh , C.C. Chang , T.C. Lin , C.W. Luo , C.S. Hwang
Vacuum ( IF 4 ) Pub Date : 2020-10-01 , DOI: 10.1016/j.vacuum.2020.109650 C.K. Chan , C.Y. Tu , S.D. Yeh , C.C. Chang , T.C. Lin , C.W. Luo , C.S. Hwang
Abstract A gasket-type standard leak element with a microfluidic channel was developed and measured. The microfluidic channel with a diameter of several micrometers and a length of one hundred micrometers was fabricated by using femtosecond laser micromachining. The conductances (
中文翻译：
使用飞秒激光微加工的垫片式标准泄漏元件
摘要 研制并测量了一种带有微流体通道的垫片式标准泄漏元件。采用飞秒激光微加工技术制造了直径为几微米、长度为一百微米的微流体通道。电导（
更新日期：2020-10-01
中文翻译：
使用飞秒激光微加工的垫片式标准泄漏元件
摘要 研制并测量了一种带有微流体通道的垫片式标准泄漏元件。采用飞秒激光微加工技术制造了直径为几微米、长度为一百微米的微流体通道。电导（
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