Abstract

A capacitive type MEMS switch with electrostatic control is presented. A movable electrode is made in the form of a beam fixed at both ends. A metal electrode with a floating potential which allows increasing the ratio of the capacities in the on and off states by more than an order of magnitude compared to the classical design is considered a feature of the device. The operating characteristics of the switch are calculated by the finite element method. Aluminum was chosen as the material of the beam and hafnium dioxide serves as the insulator. The design provides an ultrahigh capacitance ratio of up to 7400. The tripping voltage ranges from 7.5 to 58.0 V, depending on the selected geometry. Its speed is at the microsecond level. The disadvantage of the switch lies in the significant deformation of the beam with temperature. Ways to overcome it are proposed.

中文翻译：

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电容比提高的MEMS开关性能计算

摘要

提出了一种具有静电控制的电容式MEMS开关。可移动电极制成固定在两端的梁的形式。具有浮动电位的金属电极被认为是该装置的一个特征，该金属电极允许在开和关状态下的容量比率与经典设计相比增加一个数量级以上。开关的工作特性通过有限元法计算。选择铝作为梁的材料，二氧化ha用作绝缘体。该设计提供高达7400的超高电容比。跳闸电压范围为7.5至58.0 V，具体取决于所选的几何形状。它的速度是微秒级。开关的缺点在于光束随温度的明显变形。