Powered microvalves are necessary for a variety of microfluidic applications such as on-demand droplet generators and droplet capture systems. Currently, a central challenge for these microvalve systems is the miniaturization of bulky power sources and control components, for example, air compressors, hydraulic pumps, solenoid valves, and regulators. In this paper, we propose a polydimethylsiloxane (PDMS)-based microvalve integrated with an on-chip power source, an electro-conjugate fluid (ECF) micropump. The assembled PDMS membrane of the device deforms and then blockades the port in the microchannel via fluidic pressure generated by the ECF micropump with the application of high DC voltage. Following finite element method simulations, we utilized 15 electrode pairs for the on-chip ECF micropump. By combining a MEMS process and the bonding process, we successfully realized the designed device and proceeded to evaluation of its performance characteristics. First, we evaluated th...

中文翻译：

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主动微阀由电共轭流体射流驱动，芯片上带有液压动力源

电动微阀对于各种微流体应用（例如按需微滴发生器和微滴捕获系统）必不可少。当前，这些微型阀系统的主要挑战是使大型动力源和控制组件（例如空气压缩机，液压泵，电磁阀和调节器）小型化。在本文中，我们提出了一种基于聚二甲基硅氧烷（PDMS）的微型阀，该微型阀集成了片上电源，电共轭流体（ECF）微型泵。设备的组装好的PDMS膜变形，然后通过施加高DC电压通过ECF微型泵产生的流体压力，阻塞微通道中的端口。在有限元方法仿真之后，我们将15对电极用于片上ECF微型泵。通过将MEMS工艺和键合工艺相结合，我们成功实现了设计的器件，并对其性能特性进行了评估。首先，我们评估了...