当前位置: X-MOL 学术Curr. Appl. Phys. › 论文详情
Our official English website, www.x-mol.net, welcomes your feedback! (Note: you will need to create a separate account there.)
Synthesis and electrical transport of SrHfO3 thin films grown on a SrTiO3 (001) substrate using a pulsed laser deposition
Current Applied Physics ( IF 2.4 ) Pub Date : 2020-09-01 , DOI: 10.1016/j.cap.2020.05.006
Van Hien-Hoang , Thi My Nhung-Nguyen , Heon-Jung Kim

Abstract We report the deposition of epitaxial SrHfO3 thin films on a SrTiO3 (001) substrate in different substrate temperatures by using a pulsed laser deposition (PLD) method. We carried out X-ray diffraction (XRD), X-ray reflectivity (XRR), reciprocal space mapping (RSM), atomic force microscopy (AFM), resistivity, and Hall measurements to examine the crystallinity, morphology and electrical properties of these films. All films showed smooth and uniform morphology with small root mean square (RMS) roughness. While the SrHfO3 sample grown at 750 °C is metallic, the films deposited at 600 °C, 650 °C, and 700 °C show an upturn at low temperatures. The temperature dependence of the metallic parts was analyzed based on the parallel resistor model that includes resistivity saturation. On the other hand, the low-temperature upturn was found to be well described by a weak localization mechanism. We also observed the possible emergence of non-Fermi liquid behavior when the upturn disappeared. All SrHfO3 films have p-type charge carriers.

中文翻译:

使用脉冲激光沉积在 SrTiO3 (001) 衬底上生长的 SrHfO3 薄膜的合成和电传输

摘要 我们报告了使用脉冲激光沉积 (PLD) 方法在不同衬底温度下在 SrTiO3 (001) 衬底上沉积外延 SrHfO3 薄膜。我们进行了 X 射线衍射 (XRD)、X 射线反射率 (XRR)、倒易空间映射 (RSM)、原子力显微镜 (AFM)、电阻率和霍尔测量,以检查这些薄膜的结晶度、形态和电性能. 所有薄膜均显示出光滑均匀的形态,均方根 (RMS) 粗糙度很小。虽然在 750 °C 下生长的 SrHfO3 样品是金属的,但在 600 °C、650 °C 和 700 °C 下沉积的薄膜在低温下显示出上升趋势。基于包含电阻率饱和的并联电阻模型分析了金属部件的温度依赖性。另一方面,发现低温上升被弱定位机制很好地描述。我们还观察到当上升消失时可能出现非费米液体行为。所有 SrHfO3 薄膜都具有 p 型电荷载流子。
更新日期:2020-09-01
down
wechat
bug