The problem of port and starboard ambiguity will exist when only utilize the vector or scalar parameters. Meanwhile, the amplitude-phase error between the vector and scalar can also cause this problem. In this paper, a compound MEMS vector hydrophone which contains cilia vector microstructure and piezoelectric ceramic tube has been presented to solve the problem. Compared with traditional MEMS vector hydrophone, the compound MEMS vector hydrophone can realize the measurement of sound pressure and vibration velocity simultaneously.,A compound MEMS vector hydrophone has been presented. The unipolar directivity of the combined signal which combine the acoustic pressure and vibration velocity is used to achieve the direction of arrival (DOA). This paper introduced the working principle and the target detection mechanism of the compound vector hydrophone. The amplitude and phase error are analyzed and corrected in the standing wave tube. After that, the authors use beam-forming algorithm to estimate the DOA.,The experimental results in the standing wave tube and the external field verified the vector hydrophone's directional accuracy up to 1 and 5 degrees, respectively.,The research of compound vector hydrophone plays an important role in marine acoustic exploration and engineering applications.,This research provides a basis for MEMS hydrophone directivity theory. The compound vector hydrophone has been applied in the underwater location, with a huge market potential in underwater detection systems.

中文翻译：

---

MEMS矢量水听器及其定向算法研究

仅使用矢量或标量参数时，会存在左舷和右舷模糊的问题。同时，向量和标量之间的幅相误差也会导致这个问题。本文提出了一种包含纤毛矢量微结构和压电陶瓷管的复合MEMS矢量水听器来解决这个问题。与传统的MEMS矢量水听器相比,复合MEMS矢量水听器可以同时实现声压和振动速度的测量。,提出了一种复合MEMS矢量水听器。结合声压和振动速度的组合信号的单极方向性用于实现到达方向（DOA）。介绍了复合矢量水听器的工作原理和目标检测机制。在驻波管中分析和校正幅度和相位误差。之后作者使用波束形成算法估计DOA。,驻波管和外场的实验结果分别验证了矢量水听器的方向精度可达1度和5度。,复合矢量水听器的研究在海洋声学勘探和工程应用中具有重要作用。,该研究为MEMS水听器方向性理论提供了基础。复合矢量水听器已应用于水下定位，在水下探测系统中具有巨大的市场潜力。在驻波管中分析和校正幅度和相位误差。之后作者使用波束形成算法估计DOA。,驻波管和外场的实验结果分别验证了矢量水听器的方向精度可达1度和5度。,复合矢量水听器的研究在海洋声学勘探和工程应用中具有重要作用。,该研究为MEMS水听器方向性理论提供了基础。复合矢量水听器已应用于水下定位，在水下探测系统中具有巨大的市场潜力。在驻波管中分析和校正幅度和相位误差。之后作者使用波束形成算法估计DOA。,驻波管和外场的实验结果分别验证了矢量水听器的方向精度可达1度和5度。,复合矢量水听器的研究在海洋声学勘探和工程应用中具有重要作用。,该研究为MEMS水听器方向性理论提供了基础。复合矢量水听器已应用于水下定位，在水下探测系统中具有巨大的市场潜力。s方向精度分别达到1度和5度。,复合矢量水听器的研究在海洋声学勘探和工程应用中具有重要作用。,该研究为MEMS水听器方向性理论提供了基础。复合矢量水听器已应用于水下定位，在水下探测系统中具有巨大的市场潜力。s方向精度分别达到1度和5度。,复合矢量水听器的研究在海洋声学勘探和工程应用中具有重要作用。,该研究为MEMS水听器方向性理论提供了基础。复合矢量水听器已应用于水下定位，在水下探测系统中具有巨大的市场潜力。