As a new type of ultrasonic transducer with significant advantages, capacitive micromachined ultrasonic transducer (CMUT) has good application prospect. The reception characteristic of the CMUT is one of the important factors determining the application effect. This paper aims to study the reception characteristics of CMUT.,In this paper, the state equation is deduced and the analysis model is established in SIMULINK environment based on the lumped parameter system model of the CMUT cell. Based on this analysis model, the influencing factors of CMUT reception characteristics are studied and investigated, and the time-domain and frequency-domain characteristics are investigated in detail.,The analysis results show that parameters directly affect the reception characteristics of the CMUT, such as direct current (DC) bias voltage, input sound pressure amplitude and frequency. At the same time, the measurement system is built and the reception characteristics are verified.,This paper provides an effective method for rapid analyzing the reception characteristics of CMUT. These results provide an important theoretical basis and reference for further optimization of CMUT structure design, and lay a good foundation for the practical application measurement.

中文翻译：

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电容微机械超声换能器接收特性研究与测量

电容式微机械超声换能器（CMUT）作为一种具有显着优势的新型超声换能器，具有良好的应用前景。CMUT的接收特性是决定应用效果的重要因素之一。本文旨在研究CMUT的接收特性。,本文基于CMUT小区的集总参数系统模型,在SIMULINK环境下推导状态方程并建立分析模型。基于该分析模型,对CMUT接收特性的影响因素进行了研究调查,并对时域和频域特性进行了详细研究,分析结果表明参数直接影响CMUT的接收特性,如作为直流 (DC) 偏置电压，输入声压幅度和频率。同时,搭建了测量系统,对接收特性进行了验证。,本文为快速分析CMUT的接收特性提供了一种有效的方法。这些结果为CMUT结构设计的进一步优化提供了重要的理论依据和参考，为实际应用测量奠定了良好的基础。