Results of an extensive R&D program aiming at radiation hard, small pitch, 3D pixel sensors are reported. The CMS experiment is supporting this R&D in the scope of the Inner Tracker upgrade for the High Luminosity phase of the CERN Large Hadron Collider (HL-LHC). In the HL-LHC the Inner Tracker will have to withstand an integrated fluence up to $2.3\times 10^{16}{\mathrm{n}}_{\mathrm{eq}}∕{\mathrm{cm}}^2$. A small number of 3D sensors were interconnected with the RD53A readout chip, which is the first prototype of 65 nm CMOS pixel readout chip designed for the HL-LHC pixel trackers. In this paper results obtained in beam tests before and after irradiation are reported. The irradiation of a single chip module was performed up to a maximum equivalent fluence of about $1\times 10^{16}{\mathrm{n}}_{\mathrm{eq}}∕{\mathrm{cm}}^2$. The analysis of the collected data shows excellent performance: the spatial resolution in not irradiated sensors can reach about 3 to 5 $\mathrm{\mu }$m, for inclined tracks, depending on the pixel pitch. The measured hit detection efficiencies are close to 99% measured both before and after the above mentioned irradiation fluence.

报告了针对辐射硬，小间距，3D像素传感器的广泛研发计划的结果。CMS实验在CERN大型强子对撞机（HL-LHC）高光度阶段的内部跟踪器升级的范围内，为该研发提供了支持。在HL-LHC中，内部跟踪器将不得不承受高达$2。3\times \mathrm{1个}{0}^{16}{\mathrm{ñ}}_{\mathrm{当量}}∕{\mathrm{厘米}}^2$。少数3D传感器与RD53A读出芯片互连，这是为HL-LHC像素跟踪器设计的65 nm CMOS像素读出芯片的第一个原型。本文报道了辐照前后在光束测试中获得的结果。进行单芯片模块的辐照直至最大等效注量约为$\mathrm{1个}\times \mathrm{1个}{0}^{16}{\mathrm{ñ}}_{\mathrm{当量}}∕{\mathrm{厘米}}^2$。对收集到的数据的分析显示出优异的性能：未辐照传感器的空间分辨率可以达到3到5 $\mathrm{\mu }$m，对于倾斜的轨道，取决于像素间距。在上述辐照通量之前和之后测得的命中检测效率接近99％。