Abstract—

In the present study, TiN and CrN single-layer and TiN/CrN nanoscale multi-layer thin films have been deposited on 420C stainless steel (SS) substrate using a cathodic arc evaporation (CAE) method. The nanoindentation test showed that hardness of TiN/CrN nanoscale multi-layer thin film was 30 GPa that is harder than TiN (H_TiN = 23 GPa) and CrN (H_CrN = 19 GPa). Ball-on-disk tribometer and Rockwell-C indentation methods showed respectively better sliding wear performance for TiN/CrN nanoscale multi-layer coating and better adhesion strength for CrN single-layer coating in comparison to all samples. Finally it was found that the TiN/CrN nanoscale multi-layer thin film can be used for tribological applications on 420C SS where high hardness and wear resistance and low friction coefficients are essential.

中文翻译：

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阴极电弧蒸发（CAE）法制备纳米级多层薄膜

摘要-

在本研究中，TiN和CrN单层和TiN / CrN纳米级多层薄膜已通过阴极电弧蒸发（CAE）方法沉积在420C不锈钢（SS）衬底上。纳米压痕测试表明，TiN / CrN纳米多层薄膜的硬度为30 GPa，比TiN（H _TiN = 23 GPa）和CrN（H _CrN）硬。= 19 GPa）。与所有样品相比，圆盘球式摩擦计和Rockwell-C压痕方法分别显示了TiN / CrN纳米多层涂层的更好的滑动磨损性能和CrN单层涂层的更好的粘附强度。最终发现，TiN / CrN纳米级多层薄膜可用于420C SS上的摩擦学应用，在这些应用中，高硬度和耐磨性以及低摩擦系数是必不可少的。