Owing to their high sensitivity and low noise, superconducting detectors are used for photon detection from microwave to high-energy particles. X-ray detection plays an important role in materials analysis, astronomy, and medical radiography, which require high efficiency as well as high energy resolution. However, traditional semiconducting detectors cannot fulfill these requirements. In this article, we review superconducting quantum detectors for X-ray detection, including transition-edge sensor (TES), superconducting tunneling junctions (STJs), kinetic inductance detectors (KIDs) and superconducting nanowire single-photon detectors (SNSPDs), and introduce the physical structures, working mechanisms, and device behaviors of these detectors. We also review their performances regarding X-ray detection and analyze their respective characteristics. According to recent progress and the requirements of various applications, possible improvement of superconducting detectors for X-rays are discussed.

由于其高灵敏度和低噪声，超导检测器用于从微波到高能粒子的光子检测。X射线检测在材料分析，天文学和医学射线照相中起着重要的作用，这需要高效率和高能量分辨率。但是，传统的半导体探测器无法满足这些要求。在本文中，我们回顾了用于X射线检测的超导量子探测器，包括过渡边缘传感器（TES），超导隧穿结（STJ），动态电感探测器（KID）和超导纳米线单光子探测器（SNSPD），并介绍了这些检测器的物理结构，工作机制和设备行为。我们还将回顾他们在X射线检测方面的性能并分析其各自的特征。