The nanometer-scale spatial distributions of local thickness or composition of noncrystalline materials are generally measured by spectroscopy with scanning transmission electron microscopy (STEM). Since spectroscopy requires a high electron dose and causes irradiation damage, alternative non-spectroscopic methods are required to measure the local thickness or composition of electron-sensitive noncrystalline materials. Here, we focus on the radial distribution function (RDF) of the electron diffraction of non-crystalline materials. We confirm that the RDF of the electron diffraction obtained by simulation contains information on the thickness and composition. Next, we demonstrate the determination of both thickness and composition from experimentally obtained RDFs. Although some constraints are required, we determine the local thickness and composition of a BaO-SiO2 glass sample by comparing the RDFs of diffraction measured by a high-speed pixelated detector with those of the simulated diffractions. Collaterally, this determination method can improve the quality of STEM images.

中文翻译：

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通过像素化探测器获得的二元非晶材料的扫描会聚束电子衍射的局部厚度和成分测量

非晶材料的局部厚度或成分的纳米级空间分布通常通过光谱学和扫描透射电子显微镜 (STEM) 进行测量。由于光谱需要高电子剂量并导致辐射损伤，因此需要替代的非光谱方法来测量电子敏感非晶材料的局部厚度或成分。在这里，我们关注非晶材料的电子衍射的径向分布函数 (RDF)。我们确认通过模拟获得的电子衍射的 RDF 包含有关厚度和成分的信息。接下来，我们展示了从实验获得的 RDF 中确定厚度和成分的方法。虽然需要一些约束，我们通过比较高速像素化探测器测量的衍射 RDF 与模拟衍射的 RDF，确定 BaO-SiO2 玻璃样品的局部厚度和成分。附带地，这种确定方法可以提高 STEM 图像的质量。