Residual stress and internal strain induced by interface lattice mismatches between YBa₂Cu₃O_7-x thin films and substrates causes variation on microstructures and superconducting properties. In this research, we investigated small misfit misalignments of YBa₂Cu₃O_7-x thin films prepared on (LaAlO₃)_0.3-(Sr₂AlTaO₆)_0.7 (LSAT), LaAlO₃ and SrTiO₃ substrates, and their resulting effects on their superconducting properties. Residual stress and internal strain were characterized by an extended small-angle sin ²ψ method and the Williamson-Hall plot method, respectively. The results showed that the relationship of transition temperature T_c had the same variation trend as that of the strain. The existence of compressive stress was confirmed in YBa₂Cu₃O_7-x/LaAlO₃ samples while YBa₂Cu₃O_7-x/LSAT and YBa₂Cu₃O_7-x/SrTiO₃ samples displayed tensile stress. Moreover, by controlling appropriate macroscopic residual stress and microscopic internal strain would be an indispensable method for tailoring the microstructures and superconducting properties.

YBa ₂ Cu ₃ O _7-x薄膜与基底之间的界面晶格失配引起的残余应力和内部应变会引起微观结构和超导性能的变化。在这项研究中，我们研究了在（LaAlO ₃）_0.3-（Sr ₂ AlTaO ₆）_0.7（LSAT），LaAlO ₃和SrTiO ₃衬底上制备的YBa ₂ Cu ₃ O _7-x薄膜的微小失配失准及其产生的影响它们的超导特性 残余应力和内部应变的特征在于扩展的小角正弦 ² ψ法和威廉姆森霍尔曲线法，分别。结果表明，转变温度T _c与应变的变化趋势相同。在YBa ₂ Cu ₃ O _7-x / LaAlO ₃样品中证实了压缩应力的存在，而YBa ₂ Cu ₃ O _7-x / LSAT和YBa ₂ Cu ₃ O _7-x / SrTiO ₃样品中存在压应力。样品显示出拉应力。此外，通过控制适当的宏观残余应力和微观内部应变将是定制微结构和超导性能的必不可少的方法。