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An effort towards hard and tough coatings by cathodic arc deposition of Zr-Cr-O coating system
Surface & Coatings Technology ( IF 5.4 ) Pub Date : 2020-07-11 , DOI: 10.1016/j.surfcoat.2020.126177
Kai Huang , Hua Li , Yang Luo , LiuHe Li

A new coating system of Zr-Cr-O in which tetragonal ZrO2 acts as toughening agent and Cr2O3 can act as stabilizer and hard matrix was proposed. The coatings were obtained by cathodic arc deposition of Zr and Cr in gas mixture of oxygen and argon. Pure ZrO2 coatings were also deposited as control group to verify the stabilizing effect of Cr in tetragonal ZrO2. Various substrate biases were applied to modify the properties of the coatings. The result showed that monoclinic phase dominated in pure ZrO2 coating, whereas only tetragonal phase can be detected in ZrO2 coating with low Cr content. Increasing of Cr content resulted in more and more amorphous phase until crystal Cr2O3 was obtained when Cr content was higher than 90.27%. The phase composition was also affected by substrate bias. It was found that tetragonal phase in pure ZrO2 was destroyed when substrate bias was applied, whereas tetragonal phase in Cr-doped ZrO2 was very stable, and the crystallinity of the co-deposited coatings was enhanced by substrate bias. The hardness of the coatings was affected by composition, substrate bias and crystallinity. It was regretful that Cr doped t-ZrO2 coatings showed relatively low hardness due to high amount of amorphous phase. However, a remarkable plastic deformation capability was found in all the co-deposited coatings, and the coating with high Cr content and high bias voltage exhibited relatively high hardness, H/E and plastic deformation.



中文翻译:

通过Zr-Cr-O涂层系统的阴极电弧沉积来制备坚硬的涂层

提出了一种新的Zr-Cr-O涂层体系,其中四方ZrO 2充当增韧剂,而Cr 2 O 3充当稳定剂和硬质基质。通过在氧气和氩气的混合气体中Zr和Cr的阴极电弧沉积获得涂层。还沉积了纯ZrO 2涂层作为对照组,以验证Cr在四方ZrO 2中的稳定作用。施加各种基材偏压以改变涂层的性能。结果表明在纯的ZrO支配其单斜晶相2涂层,而只有四方相可以以ZrO被检测到2铬含量低的涂层。Cr含量高于90.27%时,Cr含量的增加导致越来越多的非晶相直至获得晶体Cr 2 O 3。相组成也受到衬底偏压的影响。发现当施加衬底偏压时,纯ZrO 2中的四方相被破坏,而Cr掺杂的ZrO 2中的四方相非常稳定,并且通过衬底偏压增强了共沉积涂层的结晶度。涂层的硬度受组成,基材偏斜和结晶度的影响。遗憾的是,Cr掺杂了t -ZrO 2由于大量的非晶相,涂层显示出较低的硬度。然而,在所有共沉积的涂层中都发现了显着的塑性变形能力,并且具有高Cr含量和高偏压的涂层表现出相对较高的硬度,H / E和塑性变形。

更新日期:2020-07-11
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