Hydrophone, serving as a part of sonar, has a significant effect on the performance of acoustic sensors such as frequency characteristics and sensitivity, however, some limitation such as high cost and complexity in SOI manufacturing technique hinder the industrial application of hydrophones. Therefore, a novel Micro-Electro-Mechanical Systems (MEMS) piezoelectric vector hydrophone based on PZT (lead zirconate titanate) film has been adopted in obtaining vector information of underwater sound field. The piezoelectric hydrophone sensor was analyzed, designed and fabricated with PZT-on-Si substrate, and the structure consists of a four-cantilevers and an acoustics columnar cilium fixed on the center micro mass. According to the simulation results, the piezoelectric films are optimally distributed at the tip of the four beams, where the maximum strain locates. Finally, the piezoelectric vector hydrophone was characterized by comparative calibration experiments in a standing wave bucket. This passive MEMS piezoelectric hydrophone has the characteristics of receiving sensitivity with −189.3 dB at 920 Hz (0dB = 1 V/μPa) and a typical directional pattern of "8" shape, low noise output and high dynamic test range, which is suitable for high precision passive underwater detection.

作为声纳的一部分的水听器对诸如频率特性和灵敏度之类的声学传感器的性能具有重大影响，但是，诸如SOI制造技术中的高成本和复杂性之类的一些限制阻碍了水听器的工业应用。因此，采用新型的基于PZT（钛酸锆钛酸铅）薄膜的微电子机械系统（MEMS）压电矢量水听器来获取水下声场的矢量信息。对压电水听器传感器进行了分析，设计和制造，采用PZT-on-Si衬底，其结构由四个悬臂和固定在中心微质量上的声学柱状纤毛组成。根据仿真结果，压电膜最佳地分布在四个梁的尖端，最大应变所在的位置。最后，通过在驻波桶中的比较校准实验对压电矢量水听器进行了表征。这款无源MEMS压电水听器具有在920 Hz（0dB = 1 V /μPa）时接收灵敏度为−189.3 dB的特性，并具有典型的“ 8”形方向图，低噪声输出和高动态测试范围，适用于高精度被动水下探测。