This work has demonstrated the feasibility to modulate the refractive index of YAG crystal at variable depths via electronic energy depositions of argon ions. Surface and buried cladding waveguide layers of various geometries were successfully created, which are capable of effective light confinement and guidance at infrared waveband of 1064 nm. Refractive index profiles of irradiated layers were reconstructed in a reasonable manner according to the variations of electronic stopping powers. Information about the structural damage level of ion irradiated crystal were given by measured micro-Raman spectra and signal intensity dependence on penetration depth. Ridge waveguides with superior guiding performances were also manufactured on the platform of refractive index modulated crystals. Based on the precise index modulation shown in this work, extended applications of active ion doped YAG waveguides with better performances, such as high-efficiency waveguide laser oscillation and high-gain integrated optical signal amplification, could be expected.

这项工作证明了通过氩离子的电子能量沉积来调节YAG晶体在可变深度的折射率的可行性。成功创建了各种几何形状的表面和埋层包层波导层，它们能够在1064 nm的红外波段进行有效的光限制和引导。根据电子停止能力的变化，以合理的方式重建了被辐照层的折射率分布。通过测量的拉曼光谱和信号强度对穿透深度的依赖性，给出了有关离子辐照晶体结构破坏程度的信息。在折射率调制晶体的平台上也制造了具有优异导引性能的脊形波导。基于这项工作中显示的精确索引调制，