Abstract

Using atomic force microscopy, wear is performed and the results of determining wear resistances of 100-nm-thick Cu and SiO₂ coatings and 3-μm-thick ZrN are presented. The dependences of the specific volumetric wear on the normal mechanical stress at the contact of an AFM probe with the surface during wear are found.

中文翻译：

---

探针法磨损不同硬度的薄涂层

摘要

使用原子力显微镜进行磨损，并给出确定厚度为100 nm的Cu和SiO ₂涂层和厚度为3μm的ZrN的耐磨性的结果。发现在磨损过程中，特定体积磨损与AFM探针与表面接触时的法向机械应力的相关性。