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Bandwidth enhancement in damping control for piezoelectric nanopositioning stages with load uncertainty: Design and implementation
Journal of Vibration and Control ( IF 2.8 ) Pub Date : 2020-07-06 , DOI: 10.1177/1077546320941705
Jie Ling 1 , Zhao Feng 1 , Xi Kang 2 , Xiaohui Xiao 1
Affiliation  

High bandwidth and fast tracking of desired trajectories are eagerly required in various applications that use piezoelectric nanopositioning stages, especially in atomic force microscopes where the vibration stemming from lightly damped modes of stages is a challenging control problem. In this study, a bandwidth-enhanced positive acceleration, velocity, and position feedback damping controller is presented to achieve the tracking bandwidth exceeding the first resonant frequency through using a novel pole-shift method. The stability of the positive feedback damped loop is examined by a mixed passivity, small-gain approach, and Nyquist theorem framework. Also, in conjunction with a proportional–integral tracking controller, robust stability is addressed for load uncertainties. Experimental application to a piezoelectric nanopositioning stage demonstrates that a closed-loop bandwidth of 282.5 Hz is achieved, which exceeds the dominating resonance of the stage at 210 Hz. The achieved bandwidth is 1.35 times larger than the dominating resonance, which is a competitive result among most existing damping control approaches. Comparative tracking results verify the effectiveness of the proposed control scheme on the suppression of low-frequency hysteresis and tracking performance of high-speed triangular waves under load variations.



中文翻译:

具有负载不确定性的压电纳米定位平台的阻尼控制中的带宽增强:设计和实现

在使用压电纳米定位平台的各种应用中,尤其是在原子力显微镜中,迫切需要高带宽和所需轨迹的快速跟踪,在原子力显微镜中,平台的轻阻尼模式引起的振动是一个具有挑战性的控制问题。在这项研究中,提出了一种带宽增强的正加速度,速度和位置反馈阻尼控制器,以通过使用新颖的极移法实现超过第一谐振频率的跟踪带宽。通过混合无源,小增益方法和奈奎斯特定理框架来检验正反馈阻尼环路的稳定性。此外,结合比例积分跟踪控制器,可解决负载不确定性的鲁棒稳定性。在压电纳米定位平台上的实验应用表明,实现了282.5 Hz的闭环带宽,超过了该平台在210 Hz时的主要谐振。所获得的带宽是主共振的1.35倍,这在大多数现有的阻尼控制方法中是有竞争力的结果。比较跟踪结果验证了所提出的控制方案在负载变化下抑制低频磁滞和高速三角波跟踪性能的有效性。

更新日期:2020-07-06
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