Low‐temperature cofired ceramic technology is the prerequisite for producing advanced integrated piezoelectric devices that enable modern micro‐electromechanical systems because of merits such as high level of compactness and ultralow drive voltage. However, piezoceramic structure with shear‐type outputs, as a most fundamental functional electronic element, has never been successfully fabricated into multilayer form by the cofired method for decades. Technical manufacture requirements of parallel applied electric fields and polarization are theoretically incompatible with intrinsically orthogonal orientations in naturally occurring shear modes. Herein, inspired by the philosophy of building metamaterial from identical unit cells, an artificial prototype device with distinctive patterned electrodes and arrayed piezoceramic subunits is designed and fabricated, which is proved to perfectly generate synthetic face shear deformation. At the same drive voltage, an enhanced shear‐type displacement output by over an order of magnitude is observed beyond previous d₁₅‐mode bulk elements. Further results of guided wave‐based structural health monitoring and force sensing confirm that the methodology wipes out a tough piezoelectric technique barrier, and promises to fundamentally enlighten advances of integrated shear‐mode piezoelectric devices for augmented actuation, sensing, and transduction applications.

中文翻译：

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定制人工模式以实现剪切型压电器件的共烧集成

低温共烧陶瓷技术具有高紧凑性和超低驱动电压等优点，是生产先进集成压电器件的先决条件，这些器件可实现现代微机电系统。然而，具有剪切型输出的压电陶瓷结构作为最基本的功能电子元件，几十年来从未成功地通过共烧方法制造成多层形式。平行施加电场和极化的技术制造要求在理论上与自然发生的剪切模式中本质上正交的方向不相容。在此，受从相同单元构建超材料的理念的启发，设计并制造了一种具有独特图案电极和阵列压电陶瓷子单元的人工原型装置，事实证明该装置可以完美地产生合成面剪切变形。在相同的驱动电压下，观察到剪切型位移输出比之前的 d ₁₅模式块体元件高出一个数量级以上。基于导波的结构健康监测和力传感的进一步结果证实，该方法消除了棘手的压电技术障碍，并有望从根本上启发用于增强驱动、传感和转换应用的集成剪切模式压电器件的进步。