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Wafer level characterization of silicon nitride CWDM (de)multiplexers using Bayesian inference
IEEE Photonics Technology Letters ( IF 2.6 ) Pub Date : 2020-08-01 , DOI: 10.1109/lpt.2020.3004850
Jun Rong Ong , Tina X. Guo , Thomas Y. L. Ang , Soon Thor Lim , Hong Wang , Ching Eng Png

A cascaded Mach-Zehnder interferometer based filter for coarse wavelength (de)multiplexing (CWDM) at the O-band is fabricated and tested on a silicon nitride on SOI platform. We characterize the chip-to-chip performance variability of the filter devices on a wafer. Using the optical measurement data, we apply Bayesian inference methods to estimate the waveguide geometery parameters and also quantify the uncertainty of the estimates.

中文翻译:

使用贝叶斯推理对氮化硅 CWDM(解)复用器进行晶圆级表征

在 SOI 平台上的氮化硅上制造并测试了基于级联 Mach-Zehnder 干涉仪的滤波器,用于 O 波段的粗波长(解)复用(CWDM)。我们表征了晶片上过滤器设备的芯片到芯片性能可变性。使用光学测量数据,我们应用贝叶斯推理方法来估计波导几何参数并量化估计的不确定性。
更新日期:2020-08-01
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