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Scalable high pulsed power VCSEL arrays with transparent top electrodes
IEEE Photonics Technology Letters ( IF 2.6 ) Pub Date : 2020-08-01 , DOI: 10.1109/lpt.2020.3004965 Siew Li Tan , Yong Keong Yap , Jia Jun Wong , Saurav Prakash , Gianluca Grenci , Aaron J. Danner
IEEE Photonics Technology Letters ( IF 2.6 ) Pub Date : 2020-08-01 , DOI: 10.1109/lpt.2020.3004965 Siew Li Tan , Yong Keong Yap , Jia Jun Wong , Saurav Prakash , Gianluca Grenci , Aaron J. Danner
We demonstrate an innovative approach to fabricating scalable VCSEL arrays for high-pulsed-power applications. The VCSEL arrays consist of tightly-packed, small-diameter mesas that are planarized and passivated with SU-8 resin, and connected by a large-area top transparent electrode made of indium tin oxide. Peak pulsed output power exceeding 100 kW/cm2 of active area was achieved in arrays with very smoothly etched and passivated sidewalls, without the need of oxide aperture formation.
中文翻译:
具有透明顶部电极的可扩展高脉冲功率 VCSEL 阵列
我们展示了一种为高脉冲功率应用制造可扩展 VCSEL 阵列的创新方法。VCSEL 阵列由紧密堆积的小直径台面组成,这些台面用 SU-8 树脂平面化和钝化,并通过由氧化铟锡制成的大面积顶部透明电极连接。在具有非常平滑蚀刻和钝化侧壁的阵列中实现了超过 100 kW/cm2 有源面积的峰值脉冲输出功率,无需形成氧化物孔径。
更新日期:2020-08-01
中文翻译:
具有透明顶部电极的可扩展高脉冲功率 VCSEL 阵列
我们展示了一种为高脉冲功率应用制造可扩展 VCSEL 阵列的创新方法。VCSEL 阵列由紧密堆积的小直径台面组成,这些台面用 SU-8 树脂平面化和钝化,并通过由氧化铟锡制成的大面积顶部透明电极连接。在具有非常平滑蚀刻和钝化侧壁的阵列中实现了超过 100 kW/cm2 有源面积的峰值脉冲输出功率,无需形成氧化物孔径。