当前位置: X-MOL 学术Thin Solid Films › 论文详情
Our official English website, www.x-mol.net, welcomes your feedback! (Note: you will need to create a separate account there.)
Synthesis and properties of hydrogenated aluminum thin film by reactive sputtering
Thin Solid Films ( IF 2.1 ) Pub Date : 2020-09-01 , DOI: 10.1016/j.tsf.2020.138217
A.P. Baraban , M.A. Dobrotvorskii , D.I. Elets , I.E. Gabis , V.G. Kuznetsov , V.A. Piven , A.P. Voyt , A.A. Selivanov

Abstract The synthesis procedure of a thin aluminum-hydrogen film on a silicon substrate is described and its result thoroughly investigated by a number of experimental methods. The reactive sputtering deposition was carried out to obtain a structure containing aluminum hydride. The resulting film has characteristic non-metallic properties, though according to thermal desorption studies its hydrogen content is close to AlH1.1, which is lower than stoichiometric aluminum hydride AlH3. Thermal desorption of hydrogen differs significantly from that of AlH3 powder as it has not one but several peaks. According to transmission electron microscopy the film is mostly amorphous but contains crystalline phase. Our interpretation of the experimental data suggests that some hydride phase microcrystals were formed as the film was deposited, but most hydrogen was stored inside the film without forming a crystalline structure in both bounded and unbounded states. The luminescent properties of the synthesized film are similar to aluminum hydride, and it can be concluded that the amorphous Al-H structure of the synthesized film shows resemblance with AlH3 crystals populated with hydrogen vacancies.

中文翻译:

反应溅射氢化铝薄膜的合成及性能

摘要 描述了硅衬底上薄铝氢薄膜的合成过程,并通过多种实验方法对其结果进行了深入研究。进行反应溅射沉积以获得含有氢化铝的结构。所得薄膜具有非金属特性,但根据热解吸研究,其氢含量接近 AlH1.1,低于化学计量的氢化铝 AlH3。氢的热解吸与 AlH3 粉末的热解吸明显不同,因为它不是一个而是几个峰。根据透射电子显微镜,该薄膜大部分是非晶态的,但含有结晶相。我们对实验数据的解释表明,随着薄膜的沉积,形成了一些氢化物相微晶,但大多数氢储存在薄膜内,而没有在有界和无界状态下形成晶体结构。合成薄膜的发光特性类似于氢化铝,可以得出结论,合成薄膜的非晶Al-H结构与填充有氢空位的AlH3晶体相似。
更新日期:2020-09-01
down
wechat
bug