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Effect of boron content on the structure, mechanical and tribological properties of sputtered Mo–S–B films
Surface & Coatings Technology ( IF 5.4 ) Pub Date : 2020-07-03 , DOI: 10.1016/j.surfcoat.2020.126140
W.D. Sun , X.L. Gu , L.N. Yang , J. Wang , K.F. Miao , C.Y. Dong , M. Wen , K. Zhang

Molybdenum disulfide (MoS2) is a widely applied solid lubricant due to its unique layered structure. However, low hardness and environmental sensitivity severely limit its practical application in industry. Here, Mo–S–B films were deposited on Si (100) substrates by magnetron sputtering. The structure, mechanical and tribological properties showed a significant dependency on composition and chemical bonding. Increasing the B content from 0 to 23.4 at.%, the surface became smooth, corresponding to a transition from columnar structure to dense feature, along with a phase transition from hexagonal-MoS2 to amorphous phase. The hardness lineally increased from 0.75 GPa for MoS2 to 8.38 GPa for the Mo–S–B film with 23.4 at.% B. The tribological properties of films were evaluated against steel ball using ball-on-disc tribometer. The tribological test results indicated that the increased B content led to the enhancement of wear resistance for Mo–S–B films, the wear rate of Mo–S–B films with 23.4 at.% B showed the lowest value of 5.5 × 10−7 mm3/Nm, which was two orders of magnitude lower than pure MoS2 (5.66 × 10−5 mm3/Nm). The friction coefficient just rose slightly, keeping it at the same level as pure MoS2. Raman analysis for wear debris after rubbing revealed that MoS2 tribofilm improved lubrication behavior.



中文翻译:

硼含量对溅射的Mo–SB薄膜的结构,力学和摩擦学性能的影响

二硫化钼(MoS 2)由于其独特的分层结构而被广泛应用。但是,低硬度和环境敏感性严重限制了其在工业中的实际应用。在这里,通过磁控溅射将Mo–S–B膜沉积在Si(100)衬底上。结构,机械和摩擦学性能显示出对成分和化学键的显着依赖性。将B含量从0增加到23.4原子%,表面变得光滑,对应于从柱状结构到致密特征的转变,以及从六方晶MoS 2到非晶相的相变。硬度从MoS 2的0.75 GPa线性增加含23.4 at。%B的Mo–S–B薄膜的最大摩擦力为8.38 GPa。使用圆盘摩擦计评估了薄膜对钢球的摩擦学性能。摩擦学测试结果表明,导致了增强的耐磨性的莫-S-B膜的增加的B含量,%的B与23.4的Mo-S-B膜的磨损率显示出5.5×10的最低值。- 7  mm 3 / Nm,比纯MoS 2(5.66×10 -5  mm 3 / Nm)低两个数量级。摩擦系数只是略有上升,使其与纯MoS 2处于同一水平。拉曼分析摩擦后的磨损碎片表明,MoS 2摩擦膜改善了润滑性能。

更新日期:2020-07-03
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