Abstract Micro-electro-mechanical system (MEMS) gyroscope is an important sort of inertial sensor for measuring the angular velocity of spinning structures, which has been extensively applied in various engineering areas used for guidance, location and motion control. In this paper, an improved design of MEMS vibratory ring gyroscope is proposed, in which a thin layer of piezoelectric film (PZF) is introduced encircling the circumferential surface of the ring, aiming to modify the rigidity of the gyroscope. The ring and the PZF are both driven by direct in conjunction with alternating voltages. The coupled differential equations governing the drive and sense motions are established via the Lagrangian equations. The forced responses to the periodic electrostatic action are obtained and the effects of the drive bias voltage, piezoelectric voltage and spinning speed are discussed. Numerical example demonstrates that the employment of PZF can greatly enhance the gyroscope sensitivity. Parametric vibration of the gyroscope due to periodically varying rigidity induced by the periodic piezoelectric voltage is also investigated. The stability regions of the system are acquired by using the multiple scales method, and the effect of the piezoelectric voltage is analyzed. The results show that the attached PZF can also enhance the gyroscope sensitivity by the generated parametric resonance.

中文翻译：

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改进型压电薄膜环绕MEMS环形陀螺的动力学分析

摘要 微机电系统（MEMS）陀螺仪是一种重要的旋转结构角速度测量惯性传感器，已广泛应用于各种工程领域，用于制导、定位和运动控制。在本文中，提出了一种MEMS振动环形陀螺的改进设计，其中在环形圆周表面周围引入了一层薄薄的压电薄膜（PZF），旨在修改陀螺的刚度。环和 PZF 均由直流和交流电压驱动。控制驱动和传感运动的耦合微分方程是通过拉格朗日方程建立的。获得对周期性静电作用的强制响应和驱动偏置电压的影响，讨论了压电电压和旋转速度。数值例子表明，采用PZF可以大大提高陀螺仪的灵敏度。还研究了由周期性压电电压引起的周期性变化刚度引起的陀螺参数振动。采用多尺度法得到系统的稳定区，分析压电电压的影响。结果表明，附加的 PZF 还可以通过产生的参数共振来提高陀螺仪的灵敏度。采用多尺度法得到系统的稳定区，分析压电电压的影响。结果表明，附加的 PZF 还可以通过产生的参数共振来提高陀螺仪的灵敏度。采用多尺度法得到系统的稳定区，分析压电电压的影响。结果表明，附加的 PZF 还可以通过产生的参数共振来提高陀螺仪的灵敏度。