Three-dimensional (3D) micro- and nanostructural characterization using scanning electron microscope (SEM) and electron-solid interaction simulations (ESIS) has attracted broad interest in various research fields. However, 3D SEM-ESIS still faces key challenges in characterizing and modelling complex microstructures. In this paper, a new grid-based simulation scheme is developed to enable ESIS of complex microstructures. In contrast to the widely used region-based approach, the scheme presented here uses a grid of points to represent the spatial distribution of sample compositions, which allows numerical investigation of the effect of various geometric features such as interfacial diffusion zones and complex pores in the samples. The simulation results suggest that the interfacial diffusion zone and porosity significantly influence the scattering signals. It is believed that the presented scheme acts as a useful interpretation tool in understanding a wide range of materials and paves the way to SEM-based 3D reconstruction.

中文翻译：

---

用于表征高维微结构的基于网格的电子-固体相互作用模拟

使用扫描电子显微镜 (SEM) 和电子-固体相互作用模拟 (ESIS) 进行的三维 (3D) 微结构和纳米结构表征引起了各个研究领域的广泛兴趣。然而，3D SEM-ESIS 在表征和建模复杂的微观结构方面仍然面临着关键挑战。在本文中，开发了一种新的基于网格的模拟方案，以实现复杂微结构的 ESIS。与广泛使用的基于区域的方法相比，这里提出的方案使用点网格来表示样品成分的空间分布，这允许对各种几何特征的影响进行数值研究，例如界面扩散区和复杂孔隙中的样品。模拟结果表明界面扩散区和孔隙度显着影响散射信号。据信，所提出的方案可作为一种有用的解释工具来理解各种材料，并为基于 SEM 的 3D 重建铺平了道路。