Abstract Structured light three-dimensional (3D) measurement technology is considered one of the most reliable 3D data acquisition methods. Driven by the demand for high-precision 3D data acquisition for miniaturized samples in many fields such as surface condition analysis, mechanical function test, and micro-electro-mechanical systems (MEMS) quality inspection, microscopic fringe projection profilometry (MFPP) has been developed rapidly during recent decades. Significant progress has been made in different aspects of MFPP, including its optical configurations, corresponding system calibrations, phase retrieval algorithms, and 3D coordinate reconstruction methods. In addition, the rapid advance in high-frame-rate image sensors, high-speed digital projection technology, and high-performance processors become a powerful vehicle that motivates MFPP techniques to be increasingly applied in high-speed, real-time 3D shape measurement of dynamic samples. In this paper, we present an overview of these state-of-the-art MFPP works by analyzing and comparing the measurement principles, systems structures, and key performance indexes such as the accuracy, field of view (FOV), and speed. We also discuss the potential applications of MFPP and give some recommendations about optimum MFPP optical system design for reference in related applications in the future.

中文翻译：

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显微条纹投影轮廓测量法：综述

摘要 结构光三维（3D）测量技术被认为是最可靠的3D数据采集方法之一。在表面状态分析、机械功能测试、微机电系统（MEMS）质量检测等诸多领域对微型化样品高精度3D数据采集需求的推动下，显微条纹投影轮廓仪（MFPP）应运而生。近几十年来迅速发展。MFPP 在不同方面取得了重大进展，包括其光学配置、相应的系统校准、相位检索算法和 3D 坐标重建方法。此外，高帧率图像传感器、高速数字投影技术、高性能处理器成为推动 MFPP 技术越来越多地应用于动态样本的高速、实时 3D 形状测量的强大工具。在本文中，我们通过分析和比较测量原理、系统结构和关键性能指标（如精度、视场 (FOV) 和速度）来概述这些最先进的 MFPP 工作。我们还讨论了 MFPP 的潜在应用，并给出了一些优化 MFPP 光学系统设计的建议，以供将来相关应用参考。以及关键性能指标，例如准确性、视野 (FOV) 和速度。我们还讨论了 MFPP 的潜在应用，并给出了一些优化 MFPP 光学系统设计的建议，以供将来相关应用参考。以及关键性能指标，例如准确性、视野 (FOV) 和速度。我们还讨论了 MFPP 的潜在应用，并给出了一些优化 MFPP 光学系统设计的建议，以供将来相关应用参考。