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LiCoO2 thin film cathode sputtered onto 500 °C substrate
Electrochimica Acta ( IF 6.6 ) Pub Date : 2020-07-01 , DOI: 10.1016/j.electacta.2020.136668
Chenglin Wang , Xinyi Dai , Xin Guan , Weishang Jia , Yang Bai , Jingze Li

LiCoO2 thin film cathode, which has attracted considerable attention in the past decades due to its promising application in micro-batteries, is commonly produced by magnetron sputtering combined with post-annealing treatment. However, the high temperature treatment hinders its compatibility toward a majority of substrates, while the moderate temperature post-annealing constrains its crystallinity. In this study, LiCoO2 film cathode is sputtered onto the 500 °C substrate. The in-situ annealed LiCoO2 thin film cathode is highly crystallized as hexagonal structure without cubic impurities, exhibiting a capacity retention of 75% at 1 C after 200 cycles and excellent rate performance with 55% of initial capacity at 70 C in liquid electrolyte-based cell. All solid-state thin film Li battery exhibits excellent cycle stability. The excellent electrochemical performance is ascribed to highly crystallized LiCoO2 thin film, which is trigged by high kinetic energy of the sputtered species. On the contrary, the LiCoO2 film fabricated by post-annealing at 500 °C shows much poorer electrochemical performance due to its lower crystallinity, indicating that the annealing mode is crucial for the sputtering. This work provides a new option to deposite high quality LiCoO2 thin film via in situ annealing at a relatively low temperature.



中文翻译:

LiCoO 2薄膜阴极溅射到500°C的衬底上

LiCoO 2薄膜阴极由于其在微电池中的应用前景而在过去的几十年中引起了广泛的关注,通常是通过磁控溅射结合后退火处理来生产的。但是,高温处理阻碍了其与大多数基材的相容性,而中温的后退火则限制了其结晶度。在这项研究中,将LiCoO 2薄膜阴极溅射到500°C的基板上。的原位退火的LiCoO 2薄膜阴极高度结晶为六方晶结构,没有立方杂质,经过200个循环后在1 C时表现出75%的容量保持率,在液态电解质基电池中在70 C时初始容量的55%时具有出色的速率性能。所有固态薄膜锂电池均具有出色的循环稳定性。优异的电化学性能归因于高度结晶的LiCoO 2薄膜,该薄膜被溅射物种的高动能所触发。相反,通过在500℃下进行后退火而制备的LiCoO 2膜由于其较低的结晶度而显示出非常差的电化学性能,这表明退火模式对于溅射至关重要。这项工作为沉积高质量的LiCoO 2提供了新的选择通过较低温度下进行原位退火而形成的薄膜。

更新日期:2020-07-08
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