In this work, a technique for hydrogen diffusion measurements through thin films is proposed and demonstrated. A yttrium film, which changes its refractive index upon hydrogen absorption, is used as an optical sensor to detect hydrogen. The yttrium sensor is coated with a thin (up to 12 nm) layer of test material and exposed to atomic hydrogen. To ensure that the calculated diffusion constant is not artificially changed by surfaces processes, the test layer is coated with palladium. Hydrogen diffusion through test layers of Si, Al, Ag, Ru, Mo, Al 2 O 3 and SiO 2 were measured and compared with existing data. The hydrogenation time (time to form YH 2 ) was found to exponentially scale with the enthalpy of hydrogen solution in the test material. Comparison between measured diffusion coefficients for different film thicknesses, as well as previously reported results, highlights the strong dependence of the diffusion constant on sample fabricati...

中文翻译：

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使用光学传感对金属和非金属纳米层中的H扩散进行比较测量

在这项工作中，提出并证明了一种通过薄膜进行氢扩散测量的技术。钇膜可在吸收氢后改变其折射率，被用作检测氢的光学传感器。钇传感器涂有一层薄薄的测试材料（最大12 nm），并暴露在原子氢下。为了确保计算出的扩散常数不会被表面处理人为改变，测试层镀有钯。测量了氢通过Si，Al，Ag，Ru，Mo，Al 2 O 3和SiO 2的测试层的扩散，并与现有数据进行了比较。发现氢化时间（形成YH 2的时间）与测试材料中氢溶液的焓成指数比例。比较不同膜厚度下测得的扩散系数，