A biomedical sensor that sense concentration of glycerol in a deionized water with a high sensitivity is introduced in this work. A silicon nitride layer is added to the grated substrate, glass, then a plasmonic layer has been used before adding a zinc oxide layer on the top of the plasmonic gratings. The dimensions of all layers have been optimized to obtain the maximum refractive index sensitivity. Finite difference time domain method is used to calculate a transmitted signal from the proposed structure with and without analyte material. Figure of merit, quality factor and full width half maximum are also calculated at different duty cycle. The best performance of the senor has been obtained at duty cycle 35%, figure of merit 57.6, quality factor 57.3 and linewidth 14 nm. The maximum refractive index sensitivity is 806 nm/RIU which calculated at the same duty cycle. Detecting the glycerol concentration in deionized water is simulated at the maximum sensitivity and measured at ...

中文翻译：

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使用等离激元光栅和ZnO层的高灵敏度氮化硅生物医学传感器

在这项工作中引入了一种生物医学传感器，该传感器可高灵敏度地检测去离子水中甘油的浓度。将氮化硅层添加到磨碎的基板玻璃上，然后使用等离激元层，然后再在等离激元光栅的顶部添加氧化锌层。所有层的尺寸都经过了优化，以获得最大的折射率灵敏度。时域有限差分法用于从所建议的结构中计算有无分析物材料时的透射信号。品质因数，品质因数和半峰全宽也可以在不同的占空比下计算得出。该传感器在占空比35％，品质因数57.6，品质因数57.3和线宽14 nm时获得了最佳性能。在相同的占空比下计算出的最大折射率灵敏度为806 nm / RIU。以最高灵敏度模拟检测去离子水中甘油的浓度，并在...下进行测量。