Abstract Electron beam induced effects on the sensing performance of spray-coated ZnO thin films for carbon monoxide (CO) detection are reported. The optical transmittance of pristine film was around 80% and decreased upon e-beam treatment. XRD studies confirmed the hexagonal wurtzite structure of ZnO. Carbon monoxide (CO) sensing measurements performed at 300 °C revealed that irradiated ZnO films exhibited enhanced response and recovery time compared to pristine film. The 5 kGy irradiated film displayed improved sensing performance with respect to response and recovery time towards the CO concentrations tested. It showed a quick response time of 43 s and a recovery time of 77 s towards the lowest detected CO gas limit of 2 ppm. The response time of 10 kGy irradiated film was 5 s towards 2 ppm. The 5 kGy irradiated ZnO sensor exhibited an excellent response of 1.39 and 2.63 towards 2 ppm and 5 ppm of CO gas respectively. The observed enhancement in both response and recovery times as well as response of the sensor is ascribed to the oxygen vacancies present in the film which is evident from the photoluminescence studies and also due to large number of grain boundaries.

中文翻译：

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电子束辐照对喷雾热解 ZnO 薄膜 CO 气敏性能的调节

摘要 报告了电子束诱导对用于一氧化碳 (CO) 检测的喷涂 ZnO 薄膜的传感性能的影响。原始薄膜的透光率约为 80%，并在电子束处理后降低。XRD 研究证实了 ZnO 的六方纤锌矿结构。在 300 °C 下进行的一氧化碳 (CO) 传感测量表明，与原始薄膜相比，经辐照的 ZnO 薄膜表现出增强的响应和恢复时间。5 kGy 辐照薄膜在对测试的 CO 浓度的响应和恢复时间方面显示出改进的传感性能。它显示出 43 秒的快速响应时间和 77 秒的恢复时间，达到检测到的最低 CO 气体限值 2 ppm。10 kGy 辐照薄膜的响应时间为 5 秒至 2 ppm。5 kGy 辐照的 ZnO 传感器对 2 ppm 和 5 ppm 的 CO 气体分别表现出 1.39 和 2.63 的出色响应。观察到的响应和恢复时间以及传感器响应的增强归因于薄膜中存在的氧空位，这从光致发光研究中可以明显看出，并且还归因于大量晶界。