By combining the advantage of multi-wavelength phase-shifting interferometry and two-step phase-shifting phase retrieval algorithm, the measured phase with high precision and large measuring range can be retrieved rapidly from three multi-wavelength interferograms with unknown phase shifts recorded by a single-chip color CMOS. First, two normalized differential interferograms without backgrounds are obtained by using the subtraction and then normalization among the three color interferograms. Then the wrapped phases of single wavelength are retrieved by using Gram-Schmidt (GS) orthonormalization approach. Finally the unambiguous phase of the three synthetic wavelengths can be achieved by the subtraction between the wrapped phases of corresponding wavelengths. To reduce the phase noise amplification which introduced by the magnification of wavelengths, the phase unwrapping algorithm of reducing the noise of the three synthetic wavelength to the level of two-synthetic long wavelength, single wavelength, and two-synthetic short wavelength are implemented by turn. Compared with the conventional multi-wavelength phase shifting interferometry, only three interferograms with unknown phase shifts are needed to reconstruct the actual phase of the measured object with high measurement resolution and large measurement range and can be used in dynamic phase measurement. Both simulation and experimental results demonstrate the performance of the proposed method.

中文翻译：

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基于彩色CMOS两步相移相位恢复算法的多波长相移干涉测量

结合多波长移相干涉技术和两步移相相位反演算法的优点，可以从三幅未知相移的多波长干涉图中快速反演高精度、大测量范围的被测相位。单片彩色CMOS。首先，通过在三个颜色干涉图之间进行减法和归一化，得到两个没有背景的归一化差分干涉图。然后使用Gram-Schmidt（GS）正交归一化方法检索单个波长的包裹相位。最后，三个合成波长的明确相位可以通过相应波长的包裹相位之间的减法来实现。为减小波长放大引入的相位噪声放大，依次实现将三种合成波长的噪声降低到二合成长波、单波长和二合成短波水平的相位展开算法。 . 与传统的多波长相移干涉仪相比，只需要三个未知相移的干涉图即可重建被测物体的实际相位，测量分辨率高，测量范围大，可用于动态相位测量。仿真和实验结果都证明了所提出方法的性能。和二合成短波轮流实现。与传统的多波长相移干涉仪相比，只需要三个未知相移的干涉图即可重建被测物体的实际相位，测量分辨率高，测量范围大，可用于动态相位测量。仿真和实验结果都证明了所提出方法的性能。和二合成短波轮流实现。与传统的多波长相移干涉仪相比，只需要三个未知相移的干涉图即可重建被测物体的实际相位，测量分辨率高，测量范围大，可用于动态相位测量。仿真和实验结果都证明了所提出方法的性能。