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Open-air-type Ar + H 2 O plasma treatment of polytetrafluoroethylene for improving Ag/PTFE adhesion strength: application to highly adhesive Ag direct wiring patterns
Japanese Journal of Applied Physics ( IF 1.5 ) Pub Date : 2020-06-29 , DOI: 10.35848/1347-4065/ab9cd7
Yuji Ohkubo 1 , Yoshinori Kodama 1 , Misa Nishino 1 , Takaya Oshita 2 , Tsuyoshi Uehara 2 , Katsuyoshi Endo 1 , Kazuya Yamamura 1
Affiliation  

We performed an open-air-type plasma treatment of polytetrafluoroethylene (PTFE) at atmospheric pressure to increase the adhesion strength between PTFE and an Ag metal film obtained from Ag ink. When PTFE was Ar plasma-treated without H 2 O addition for 600 s, the coloration of the PTFE surface occurred, and the Ag/PTFE adhesion strength was 0.06 N mm −1 . This adhesion strength was the same as that of the as-received PTFE (0.04 N mm −1 ). When the PTFE was Ar plasma-treated with the H 2 O addition of ca. 0.1% for 600 s, coloration did not occur, and the Ag/PTFE adhesion strength increased to 1.03 N mm −1 . The effects of H 2 O addition to the Ar plasma on the Ag/PTFE adhesion strength, surface chemical composition, surface morphology, and the surface hardness were investigated and discussed in this study.

中文翻译:

空气中Ar + H 2 O等离子体对聚四氟乙烯的处理,以提高Ag / PTFE的粘合强度:应用于高粘合力的Ag直接布线图案

我们在大气压力下对聚四氟乙烯(PTFE)进行了开放式等离子体处理,以提高PTFE与从Ag油墨获得的Ag金属膜之间的粘合强度。当在不添加H 2 O的情况下对PTFE进行Ar等离子体处理600s时,发生PTFE表面的着色,并且Ag / PTFE的附着强度为0.06Nmm -1。该粘合强度与所接收的PTFE的粘合强度相同(0.04Nmm -1)。当用H 2 O对PTFE进行Ar等离子处理时,加入大约2 mol。0.1%持续600s,未发生着色,Ag / PTFE的粘接强度提高至1.03Nmm -1。在本研究中,研究和讨论了在Ar等离子体中加入H 2 O对Ag / PTFE粘附强度,表面化学成分,表面形态和表面硬度的影响。
更新日期:2020-06-30
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