Ar-gas-cluster ion beam (GCIB) sputter collecting method was developed and applied for multiple organic analysis methods of a polymer thin layer. By using this method, a polyvinylpyrrolidone thin layer (50 nm thick) on a polyethylene terephthalate substrate film could be selectively collected and analyzed by pyrolysis-gas chromatography-mass spectrometry. Furthermore, it was also applied to molecular weight distribution analyses of polymethylmethacrylate (PMMA) thin layers (50 nm thick) by matrix assisted laser desorption/ionization-mass spectrometry, and this revealed that the molecular weight of the collected PMMA polymer was slightly lower and showed a tendency that lowering of the molecular weight of collected PMMA decreased with an increase in the GCIB acceleration voltage. This phenomenon proposed that there were differences in damages between the first and second bombardments of Ar-GCIB sputtering processes, and the second bombardment area could be relatively larger than a low voltage, showing that the damage of the collected polymer was relatively less in high acceleration voltage of the GCIB.

中文翻译：

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使用Ar-gas-cluster离子束溅射收集法对有机超薄层进行结构分析

开发了氩气簇离子束（GCIB）溅射收集方法，并将其应用于聚合物薄层的多种有机分析方法。通过使用这种方法，可以选择性地收集聚对苯二甲酸乙二醇酯基底膜上的聚乙烯吡咯烷酮薄层（50 nm 厚），并通过热解-气相色谱-质谱法进行分析。此外，它还通过基质辅助激光解吸/电离质谱法应用于聚甲基丙烯酸甲酯 (PMMA) 薄层（50 nm 厚）的分子量分布分析，这表明收集到的 PMMA 聚合物的分子量略低且显示出随着GCIB加速电压的增加，收集到的PMMA的分子量降低的趋势。