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Electron dynamics during the reignition of pulsed capacitively-coupled radio-frequency discharges
Journal of Vacuum Science & Technology B ( IF 1.4 ) Pub Date : 2020-05-01 , DOI: 10.1116/1.5133790
Keith Hernandez 1 , Lawrence J. Overzet 1 , Matthew J. Goeckner 1, 2
Affiliation  

The authors report on phase resolved optical emission spectroscopy (PROES) measurements of pulsed capacitive coupled plasmas (CCPs) through argon. The PROES results indicate that under some conditions, the electron heating mechanism can be changed substantially from that dominant in continuous CCPs. The normally dominant α heating mode of electropositive plasmas can be aided by a drift-ambipolar (DA) heating mode during the early portion of the reignition. The DA heating mode is ordinarily only found in electronegative discharges. The authors found that Ar discharges pulsed at 10 kHz only exhibited the α heating mode throughout the reignition process, while those pulsed at 0.1 kHz exhibited a mixed α and DA heating mode during the reignition. The differences in the two heating modes cause substantial differences in the spatial pattern of the light emission from the plasma in addition to an overshoot in the light emission intensity.

中文翻译:

脉冲电容耦合射频放电重燃过程中的电子动力学

作者报告了通过氩气对脉冲电容耦合等离子体 (CCP) 进行相分辨发射光谱 (PROES) 测量。PROES 结果表明,在某些条件下,电子加热机制可以从连续 CCP 中的主导机制发生显着变化。在重燃的早期阶段,正电等离子体通常占主导地位的 α 加热模式可以通过漂移双极 (DA) 加热模式来辅助。DA 加热模式通常只出现在负电放电中。作者发现,10 kHz 脉冲的 Ar 放电在整个重燃过程中仅表现出 α 加热模式,而 0.1 kHz 脉冲的 Ar 放电在重燃过程中表现出混合的 α 和 DA 加热模式。
更新日期:2020-05-01
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