The apparent improvement of the depth resolution in secondary ion mass spectrometry depth profiles using cluster secondary ions (Me2+, Me3+) as compared to single ion profiles (Me+) is explained to be an artifact caused by an attractive interaction enhancing cluster formation. Successful application of the mixing-roughness-information depth model shows how different profiles are interconnected and discloses that the depth resolutions of single ion and cluster ion profiles are in fact identical.

中文翻译：

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使用簇离子检测通过 SIMS 提高表观深度分辨率的解释

与单离子剖面 (Me+) 相比，使用簇次级离子 (Me2+, Me3+) 的次级离子质谱深度剖面中深度分辨率的明显改善被解释为由增强簇形成的吸引力相互作用引起的伪影。混合粗糙度信息深度模型的成功应用显示了不同剖面是如何相互关联的，并揭示了单个离子和簇离子剖面的深度分辨率实际上是相同的。