Abstract Zinc oxide (ZnO) thin films were deposited on Si (1 0 0) and glass substrates by sol-gel spin coating technique. Zinc acetate dihydrate, monoethanolamine and isopropanol were used as the sources for precursor solution and the resulting gel was used for the preparation of ZnO thin films. The films were annealed at different temperatures (100 °C to 500 °C) and the effect of annealing on the structural and optical properties was investigated. X-ray diffraction (XRD) and UV-Vis spectroscopy were used for the analysis of the films. The XRD results indicated the polycrystalline hexagonal structure of the ZnO films with (0 0 2) orientation. The optical properties of the films were studied using UV-Vis spectrophotometer in the wavelength range of 190 – 1100 nm. The optical characterization of the ZnO thin films showed the high transmittance of ~90 % for the films annealed at 400 °C. The films showed the absorbance ~360 – 390 nm and bandgap values of 3.40 – 3.10 eV, depending on the annealing temperature of the films.

中文翻译：

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溶胶-凝胶旋涂法制备ZnO薄膜的结构和光学性能

摘要 采用溶胶-凝胶旋涂技术在Si (1 0 0)和玻璃基板上沉积氧化锌(ZnO)薄膜。醋酸锌二水合物、单乙醇胺和异丙醇用作前体溶液的来源，所得凝胶用于制备 ZnO 薄膜。薄膜在不同温度（100°C 至 500°C）下退火，并研究了退火对结构和光学性能的影响。X 射线衍射 (XRD) 和 UV-Vis 光谱用于分析薄膜。XRD结果表明ZnO薄膜具有(0 0 2)取向的多晶六方结构。使用紫外-可见分光光度计在 190 – 1100 nm 的波长范围内研究薄膜的光学特性。ZnO 薄膜的光学特性表明，在 400 °C 下退火的薄膜具有 ~90% 的高透射率。根据薄膜的退火温度，薄膜的吸光度约为 360 – 390 nm，带隙值为 3.40 – 3.10 eV。