Abstract The purpose of this study was to determine the influence of different substrates (C45 steel, polycarbonate, glass) on the topography as well as tribological and mechanical properties (nanohardness, modulus of elasticity and friction force) of aluminum, gold and silver thin films. The 3D image analysis showed a strong influence of the substrate material on the topography of the studied thin films with no certain variation rule. Using the Oliver and Pharr method for determining nanohardness it was observed that, the smallest values were obtained for the thin films deposited on plastic substrate, followed by glass and C45 steel, regardless of the deposited material. The determination of the modulus of elasticity was done using the Hertzian method. The obtained results showed that the highest values of this parameter were obtained for the films deposited on plastic substrate, while the lowest values depended on both the deposited material and substrate. Friction force analysis for aluminum and gold showed a significant impact of the substrate material, with more constant values for gold. As a consequence, one must pay a particular attention when choosing the material for the substrate on which the thin films are deposited.

中文翻译：

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沉积在不同基材上的金属薄膜的纳米表征

摘要 本研究的目的是确定不同基材（C45 钢、聚碳酸酯、玻璃）对铝、金和银薄膜的形貌以及摩擦学和机械性能（纳米硬度、弹性模量和摩擦力）的影响。 . 3D 图像分析表明，衬底材料对所研究薄膜的形貌有很强的影响，没有一定的变化规律。使用 Oliver 和 Pharr 方法确定纳米硬度，观察到沉积在塑料基板上的薄膜的最小值，其次是玻璃和 C45 钢，无论沉积的材料如何。弹性模量的测定使用赫兹方法进行。所得结果表明，该参数的最高值是在塑料基板上沉积的薄膜中获得的，而最低值取决于沉积材料和基板。铝和金的摩擦力分析显示了基材材料的显着影响，金的值更恒定。因此，在选择用于沉积薄膜的基板材料时，必须特别注意。