Nowadays, the display industry is endeavoring to develop technology to provide large-area organic light-emitting diode (OLED) display panels with 8K or higher resolution. Although the selective deposition of organic molecules through shadow masks has proven to be the method of choice for mobile panels, it may not be so when independently defined high-resolution pixels are to be manufactured on a large substrate. This technical challenge motivated us to adopt the well-established photolithographic protocol to the OLED pixel patterning. In this study, we demonstrate the two-color OLED pixels integrated on a single substrate using a negative-tone highly fluorinated photoresist (PR) and fluorous solvents. Preliminary experiments were performed to examine the probable damaging effects of the developing and stripping processes upon a hole-transporting layer (HTL). No significant deterioration in the efficiency of the develop-processed device was observed. Efficiency of the device after lift-off was up to 72% relative to that of the reference device with no significant change in operating voltage. The procedure was repeated to successfully obtain two-color pixel arrays. Furthermore, the patterning of 15 μm green pixels was accomplished. It is expected that photolithography can provide a useful tool for the production of high-resolution large OLED displays in the near future.

中文翻译：

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使用光刻技术实现高分辨率有机发光显示器的双色像素图案化。

如今，显示行业正在努力开发技术，以提供8K或更高分辨率的大面积有机发光二极管（OLED）显示面板。尽管通过荫罩选择性沉积有机分子已被证明是移动面板的选择方法，但是要在大型基板上制造独立定义的高分辨率像素时，可能并非如此。这项技术挑战促使我们将成熟的光刻协议应用于OLED像素图案。在这项研究中，我们演示了使用负离子高度氟化的光刻胶（PR）和氟溶剂将两种颜色的OLED像素集成在单个基板上。进行了初步实验，以检查显影和剥离工艺对空穴传输层（HTL）的可能的破坏作用。没有观察到显影处理后的装置的效率显着降低。相对于参考设备，提起后设备的效率高达72％，而工作电压没有明显变化。重复该过程以成功获得两色像素阵列。此外，完成了15μm绿色像素的图案化。期望在不久的将来光刻可以为生产高分辨率的大型OLED显示器提供有用的工具。相对于参考设备，提起后设备的效率高达72％，而工作电压没有明显变化。重复该过程以成功获得两色像素阵列。此外，完成了15μm绿色像素的图案化。期望在不久的将来光刻可以为生产高分辨率的大型OLED显示器提供有用的工具。相对于参考设备，提起后设备的效率高达72％，而工作电压没有明显变化。重复该过程以成功获得两色像素阵列。此外，完成了15μm绿色像素的图案化。期望在不久的将来光刻可以为生产高分辨率的大型OLED显示器提供有用的工具。