In scanning laser projection systems, the laser modulation time is important for the projection resolution. The modulation time needs to be matched with the motion of the micromirror. For this paper, the piezoresistive sensor was integrated on the torsion beam of the micromirror to monitor the physical position of the micromirror. The feedback signal was used to generate the zero-crossing time, which was used to estimate the physical position of the resonating mirror over time. The estimated position was affected by the zero-crossing time and the error directly influenced the definition of the projected image. By reducing the impurity concentration from 3 × 10¹⁸/cm³ to 1 × 10¹⁸/cm³ and increasing shear stress on piezoresistive sensor, the sensitivity of the piezoresistive sensor increased from 4.4 mV/V° to 6.4 mV/V° and the error of the image pixel reduced from 1.5 pixels to 0.5 pixels. We demonstrated that the image quality of an Optical-Microeletromechanical Systems (MOEMS) laser projection could be improved by enhancing the sensitivity of the piezoresistive sensor.

中文翻译：

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通过增强的压阻灵敏度优化MOEMS投影模块的性能。

在扫描激光投影系统中，激光调制时间对于投影分辨率很重要。调制时间需要与微镜的运动相匹配。在本文中，压阻传感器集成在微镜的扭力梁上，以监视微镜的物理位置。反馈信号用于生成过零时间，该时间用于估计随时间变化的谐振镜的物理位置。估计位置受过零时间的影响，误差直接影响投影图像的清晰度。通过将杂质浓度从3×10 ¹⁸ / cm ^3降低到1×10 ¹⁸ / cm ³随着压阻传感器上的剪切应力的增加，压阻传感器的灵敏度从4.4 mV / V°增加到6.4 mV / V°，图像像素的误差从1.5像素减少到0.5像素。我们证明，通过增强压阻传感器的灵敏度，可以改善光学微电子机械系统（MOEMS）激光投影的图像质量。