Abstract In this paper, a novel range-based control algorithm for dual-stage nanopositioners is studied. Dual-stage nanopositioning systems have the powerful ability to achieve high-speed and long-range positioning by coupling a short-range, high-speed actuator with a long-range, low-speed actuator. One of the drawbacks of currently implemented control algorithms is that they tend to determine control allocation to the individual actuators based on the frequency of the desired motion. This can result in reduced positioning resolution and increased energy use, thus motivating this work on a control algorithm that considers range. The range-based algorithm allows the user to allocate control efforts to the individual actuators based on their range capabilities. This paper discusses the analysis, design, and implementation of the range-based control algorithm and highlights its benefits by experimentally comparing it to four other widely used dual-stage positioner control algorithms. Experimental results show that the method effectively splits control effort between the actuators based on range and results in reduced tracking error.

中文翻译：

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双级纳米定位器基于范围控制的分析与实验比较

摘要 本文研究了一种新型的双级纳米定位器的基于范围的控制算法。双级纳米定位系统通过将短程、高速执行器与远程、低速执行器耦合，具有实现高速和远程定位的强大能力。当前实施的控制算法的缺点之一是它们倾向于根据所需运动的频率确定对各个致动器的控制分配。这会导致定位分辨率降低和能源使用增加，从而推动在考虑范围的控制算法上开展这项工作。基于范围的算法允许用户根据其范围能力将控制力度分配给各个执行器。本文讨论了分析、设计、和基于范围的控制算法的实现，并通过实验将其与其他四种广泛使用的双级定位器控制算法进行比较来突出其优势。实验结果表明，该方法基于距离有效地分割了执行器之间的控制工作，并减少了跟踪误差。