In this paper, a novel RF MEMS shunt capacitive switch with application in the Ka frequency band is proposed. The spring design and the step structure added to the beam succeeded in improving the performance of the switch and reducing the stress which results in extended life-time of the switch. Also, by optimally reducing the gap between the dielectric and the beam (without problems such as self-actuation), the actuation voltage of the switch is significantly reduced. Electromechanical and scattering parameters analysis have been done by using COMSOL Multiphysics and HFSS software, respectively. The actuation voltage of the proposed device is 9.2 V. Since the aluminum has a lower mass compared to gold, an aluminum beam has been used in the switch. Desirable scattering parameters at the resonance frequency of 33.5 GHz have been obtained which include insertion loss of − 0.3 dB and return loss of − 18 dB. The high isolation of − 57 dB verifies the improved performance of the switch. Finally, as another innovation in this paper, the effect of inductor and capacitor presence in the input of transmission line is investigated. This analysis has been done by using ADS. Results of the circuit analysis presented in this paper, help the MEMS switch designers to understand the realistic switch behavior before fabrication which considerably saves cost and time.

本文提出了一种新颖的RF MEMS并联电容开关，并在Ka频段上得到了应用。弹簧设计和添加到横梁上的阶梯结构成功地改善了开关的性能并减少了应力，从而延长了开关的使用寿命。而且，通过最佳地减小电介质和电子束之间的间隙（不存在诸如自激励之类的问题），可以大大降低开关的激励电压。分别使用COMSOL Multiphysics和HFSS软件进行了机电和散射参数分析。所提出的设备的激励电压为9.2V。由于铝的质量比金的质量低，因此在开关中使用了铝梁。共振频率为33时具有理想的散射参数。已获得5 GHz，其中包括-0.3 dB的插入损耗和-18 dB的回波损耗。− 57 dB的高隔离度验证了开关性能的提高。最后，作为本文的另一项创新，研究了传输线输入中电感和电容器存在的影响。此分析已通过使用ADS完成。本文介绍的电路分析结果有助于MEMS开关设计人员在制造之前了解现实的开关性能，从而大大节省了成本和时间。此分析已通过使用ADS完成。本文介绍的电路分析结果有助于MEMS开关设计人员在制造之前了解现实的开关性能，从而大大节省了成本和时间。此分析已通过使用ADS完成。本文介绍的电路分析结果有助于MEMS开关设计人员在制造之前了解实际的开关性能，从而大大节省了成本和时间。