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MEMS multi-vibrating ring gyroscope for space applications
Microsystem Technologies ( IF 2.1 ) Pub Date : 2020-03-02 , DOI: 10.1007/s00542-020-04793-x
Waqas Amin Gill , Dima Ali , Boo Hyun An , Wajih U. Syed , Numan Saeed , Muneera Al-shaibah , Ibrahim M. Elfadel , Sultan Al Dahmani , Daniel S. Choi

This paper presents the design of a novel multi-ring vibratory gyroscope. The design incorporates two sets of rings, inner and outer, separated by a set of perforated inertial masses and connected to the outermost anchors by the means of springs. The structure’s performance is enhanced by utilizing springs with bends that play a significant role in reducing the device’s sensitivity to external shocks. The amalgamation of multiple rings with the C-shaped springs provides higher sensitivity with high shock resistance that makes this multi-vibrating ring gyroscope an ideal inertial sensor for space applications. Such a structure yields in-plane flexural modes that are utilized to sense rotation along the axis normal to the structure’s plane.



中文翻译:

用于太空应用的MEMS多振动环陀螺仪

本文介绍了一种新型的多环振动陀螺仪的设计。该设计包括两组环,内环和外环,由一组穿孔的惯性质量隔开,并通过弹簧连接到最外层的锚。通过利用带有弯曲的弹簧来增强结构的性能,这些弹簧在降低设备对外部冲击的敏感性方面起着重要作用。C形弹簧将多个环融合在一起,可提供更高的灵敏度和较高的抗震性,这使得该多振动环陀螺仪成为太空应用的理想惯性传感器。这样的结构产生平面内弯曲模式,该平面内弯曲模式用于感测沿着垂直于该结构平面的轴的旋转。

更新日期:2020-03-02
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