We present a method for tuning the resonance frequency of a comb resonator using a combination of mechanically softening and hardening springs in order to achieve a high tuning range of resonant frequency. The nonlinear behavior of the structure is due to an angle in the main beam of a crab-leg flexure. Theoretical and simulation results are done to analyze the linear, quadratic, and cubic stiffness as well as frequency changes of the comb drive actuators. The frequency response of the resonator is achieved using the Lindstedt-Poincaré perturbation technique. In order to validate the theoretical analysis, the results are compared with simulation results obtained by COMSOL software.

我们提出了一种结合使用机械软化和硬化弹簧来调整梳齿谐振器谐振频率的方法，以实现谐振频率的高调谐范围。结构的非线性行为归因于蟹腿挠曲主梁的角度。进行了理论和仿真结果，以分析梳齿驱动执行器的线性，二次和三次刚度以及频率变化。谐振器的频率响应是使用Lindstedt-Poincaré微扰技术实现的。为了验证理论分析，将结果与COMSOL软件获得的仿真结果进行比较。