The transparent window in optical fiber at 2-μm waveband enables a huge potential for fiber optical communications. Intensive efforts have been devoted to pursuit of photonic devices in this new band. The arrayed waveguide grating (AWG) is one of the key components for various functionalities like wavelength multiplexer, optical filter, spectrometer and so forth. However, the integrated and wavelength tunable AWG has not been realized in the 2-μm wavelength range yet. Here, we demonstrate an 8-channel thermo-optic tunable AWG at 2 μm via silicon photonic multi-project wafer shuttle run. The device is fully compatible with standard foundry fabrication process without customization. The TiN heater is designed for uniform waveguide heating and wavelength detuning. Experiments show that the fabricated AWG has a dense channel spacing of 1.6 nm and a minimum insertion loss of 6.1 dB. The wavelength tuning efficiency is measured to be 6.4 nm/W.

中文翻译：

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2-um 波段热光可调硅阵列波导光栅

2μm 波段光纤中的透明窗口为光纤通信提供了巨大的潜力。已经投入大量精力来追求这个新频段中的光子器件。阵列波导光栅 (AWG) 是波长多路复用器、滤光器、光谱仪等各种功能的关键组件之一。然而，集成和波长可调的 AWG 尚未在 2-μm 波长范围内实现。在这里，我们通过硅光子多项目晶圆穿梭运行展示了 2 μm 的 8 通道热光可调 AWG。该设备完全兼容标准代工制造工艺，无需定制。TiN 加热器设计用于均匀的波导加热和波长失谐。实验表明，制造的 AWG 的密集通道间距为 1。6 nm 和 6.1 dB 的最小插入损耗。测得的波长调谐效率为 6.4 nm/W。