Triboelectric nanogenerators have attracted wide attention due to their promising capabilities of scavenging the ambient environmental mechanical energy. However, efficient energy management of the generated high-voltage for practical low-voltage applications is still under investigation. Autonomous switches are key elements for improving the harvested energy per mechanical cycle, but they are complicated to implement at such voltages higher than several hundreds of volts. This paper proposes a self-sustained and automatic hysteresis plasma switch made from silicon micromachining, and implemented in a two-stage efficient conditioning circuit for powering low-voltage devices using triboelectric nanogenerators. The hysteresis of this microelectromechanical switch is controllable by topological design and the actuation of the switch combines the principles of micro-discharge and electrostatic pulling, without the need of any power-consuming control electronic circuits. The experimental results indicate that the energy harvesting efficiency is improved by two orders of magnitude compared to the conventional full-wave rectifying circuit.

摩擦电纳米发电机由于其清除周围环境机械能的有前途的能力而备受关注。然而，仍在研究用于实际低压应用的产生的高压的有效能量管理。自主开关是提高每个机械循环的能量收集效率的关键要素，但是在高于几百伏的电压下实施时，它们很复杂。本文提出了一种由硅微机械加工制成的自持式自动磁滞等离子体开关，并在两级高效调节电路中实现，以利用摩擦电纳米发电机为低压设备供电。该微机电开关的磁滞可通过拓扑设计来控制，并且该开关的致动结合了微放电和静电拉动的原理，而无需任何耗电的控制电子电路。实验结果表明，与常规的全波整流电路相比，能量收集效率提高了两个数量级。