A low temperature co‐fired ceramic (LTCC) material system has been used to develop a protype field emission cathode structure for use in an experimental magnetron oscillator. The structure is designed for used with 30 gated field emission array (GFEA) die electrically connected through silver metal traces and electrical vias. To approximate a cylinder, the cathode structure (48 mm long and 13.7 mm in diameter) is comprised of 10 faceted plates which cover the GFEA dies. Slits in the facet plates allow electron injection. The GFEA die (3 mm × 8 mm) are placed in axial columns of 3 and spaced azimuthally around a cylindrical support structure in a staggered configuration resulting in 10 azimuthal locations. LTCC manufacturing techniques were developed in order to fabricate the newly designed cathode with seven layers wrapped to form the cylinder with electrical traces and vias. Two different cathode wrapping techniques and two different via filling techniques were studied and compared. Two different facet plate manufacturing techniques were studied. Finally, four different support stand configurations for firing the cylindrical structure were also compared with a square post stand having the best circularity and linearity measurements of the fired structure.

中文翻译：

---

用于磁控振荡器实验的阴极支撑结构

低温共烧陶瓷（LTCC）材料系统已用于开发用于实验磁控振荡器的原型场发射阴极结构。该结构设计用于与30个门控场发射阵列（GFEA）芯片一起使用，这些芯片通过银金属走线和电通孔进行电连接。为了近似圆柱体，阴极结构（长48毫米，直径13.7毫米）由10个切面的板组成，这些板覆盖GFEA模具。刻面板上的缝隙允许电子注入。将GFEA模具（3毫米×8毫米）放置在3根轴向圆柱中，并以交错配置围绕圆柱支撑结构沿方位角间隔开，从而产生10个方位角位置。开发LTCC制造技术是为了制造新设计的阴极，该阴极具有七个包裹层，以形成带有电气走线和过孔的圆柱体。研究并比较了两种不同的阴极包裹技术和两种不同的通孔填充技术。研究了两种不同的刻板制造技术。最后，还将用于烧制圆柱形结构的四种不同的支撑架配置与具有最佳烧制结构的圆形度和线性度的方形立柱架进行了比较。