In present work, a pulse-by-pulse ablation model is established to numerically predict the surface evolution by ultrafast laser ablation of fused silica, where the changes of surface morphology and ablation threshold caused by preceding pulses are taken into consideration. The present model, in which the ablation coefficient is experimentally calibrated at different pulse energies, is used to predict the sectional profiles of micro channels at different scanning velocities, repetition frequencies and scanning strategies. The causes of the predictive errors and the scope of the model are analyzed to illustrate the effectiveness of the present model.

中文翻译：

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超快激光烧蚀熔融石英的表面演变

在目前的工作中，建立了逐脉冲烧蚀模型，以数值预测熔融石英的超快激光烧蚀的表面演变，其中考虑了由先前脉冲引起的表面形态和烧蚀阈值的变化。本模型中的消融系数在不同的脉冲能量下进行了实验校准，用于预测不同扫描速度，重复频率和扫描策略下微通道的截面轮廓。分析了预测误差的原因和模型的范围，以说明本模型的有效性。